| DATE |
LINE NAME |
�EQUIPMENT |
Qty |
2000〜
2003 |
Line |
Sputter for ITO, Metal
In Line CVD
Exposure
Stepper |
25
5
26
15 |
| 2003/05 |
P5 STN Line |
Front-End/Buck-End/Module |
|
| 2003/08 |
P1 STN Line
P3 STN Line
P4 STN Line |
Front-End/Buck-End/Module |
|
| 2003/08 |
TFT-Array Line |
Stepper
CVD
Sputter
Coater
Developer
Dry Etcher |
8
4
5
8
4
6 |
| 2004/01 |
TFT-Cell Line |
Front-End |
|
| 2004/10 |
Color Filter Line |
R.G.B. BM Line
R.G.B. BM Line
OC Line |
|
| 2004/12 |
C-STN Line |
Front-End/Buck-End/Module |
|
| 2005/01 |
Color Filter Line |
R.G.B,BM,OC
Line |
3 |
| 2005/02 |
TFT-Cell Line |
TFT Cell Line
(Front-End) |
|
| 2005/03 |
Color Filter Line |
R.G.B, BM Line
R.G.B, BM Line
OC Line |
|
| 2005/03 |
TFT-Array |
CVD M/C
Coater M/C
Aligner M/C |
3 |