| Process |
Equipment |
Maker |
| Furnace |
Horizontal Furnace
Vertical Furnace |
TEL, SVG, Kokusai, Semitool |
| Ion Implant |
Ion Implanter |
Eaton, Nissin |
| Thin Film |
LPCVD, PECVD, APCVD,
Sputter, Evaporator |
TEL, AMAT, Kokusai, Ulvac,
Anelva, Hitachi, ASM |
| Lithography |
Spin Coater, Aligner,
Stepper, Developer |
DNS, TEL, Canon, Nikon |
| Wet Clean/Etch |
RCA Cleaner, Etch,
Spin Dryer, Ultrasonic Oscillator |
DNS |
| Dry Etch |
Oxide & Nitride, Metal Etcher |
Hitachi, Tegal, LAM, AMAT |
| Testing Measurement |
Microscope, SEM, Prober |
Nikon, Olympus, Hitachi,
JEOL, TEL |
|
|
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